We provide InGaAsP/InGaAs epi on InP substrates as follows:
1.Structure: 1.55um InGaAsP QW laser
No. |
Layer |
Doping |
|
0 |
InP Substrate |
S-doped, 2E18/cm-3 |
|
1 |
n-InP buffer |
1.0um, 2E18/cm-3 |
|
2 |
1.15Q-InGaAsP waveguide |
80nm,undoped |
|
3 |
1.24Q-InGaAsP waveguide |
70nm,undoped |
|
4 |
4×InGaAsP QW(+1%) |
5nm |
|
5 |
1.24Q-InGaAsP waveguide |
70nm,undoped |
|
6 |
1.15Q-InGaAsP waveguide |
80nm,undoped |
|
7 |
InP space layer |
20nm,undoped |
|
8 |
InP |
100nm,5E17 |
|
9 |
InP |
1200 nm, 1.5E18 |
|
10 |
InGaAs |
100 nm, 2E19 |
2.Specification:
1) Method: MOCVD
2) Size of wafer: 2”
3) InGaAsP/InGaAs growth on InP substrates
4) 3-5 types of InGaAsP composition
5) PL tolerance of +/- 5nm, PL std. dev. <3nm across the wafer (with an exclusion zone of 5mm from the wafer circumference)
6) PL target range 1500nm.
7) Strain target -1.0% +/- 0.1% (compressive strain)
8) No. of layers: 8-20
9) Total growth thickness: 1.0~3.0um
10) Parameters to be measured: X-Ray Diffraction Measurement (thickness, strain), Photoluminescence Spectrum (PL, PL uniformity), Carrier Concentration Profiling
We compare the photocarrier lifetime measured in Br-irradiated InGaAs and cold Fe-implanted InGaAsP. We also demonstrate the possibility of a two-photon absorption (TPA) process in ErAs:GaAs. The lifetime and the TPA were measured with a fiber-based 1550 nm time-resolved differential transmission (∆T) set-up. The InGaAs-based materials show a positive ∆T with sub-picosecond lifetime, whereas ErAs:GaAs shows a negative ∆T consistent with a two-photon absorption process.
Source: semiconductorwafers.net
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