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3-1. Large Point Defects

3.Definitions of Silicon Carbide Epitaxy

3-1. Large Point Defects

2018-01-08

Defects which exhibit a clear shape to the unassisted eye and are > 50 microns across. These features include spikes, adherent particles, chips and craters. Large point defects less than 3 mm apart count as one defect.

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