2.Definition of Dimensional Properties,Terminology and Methods of Silicon Carbide Wafer

2-20.Linear Crystallographic Defects

2018-01-08

Crystalline solids exhibit a periodic crystal structure. The positions of atoms or molecules occur on repeating fixed distances, determined by the unit cell parameters. However, the arrangement of atom or molecules in most crystalline materials is not perfect. The regular patterns are interrupted by crystallographic defects Striations in silicon carbide are dened as linear crystallographic defects extending down from the surface of the wafer which may or may not pass through the entire thickness of the wafer, and generally follow crystallographic planes over its length.

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