Products
Thanks to MOCVD and MBE technology,PAM-XIAMEN, a epitaxial wafer supplier, offers epitaxial wafer products, including GaN epitaxial wafer, GaAs epitaxial wafer, SiC epitaxial wafer, InP epitaxial wafer, and now we give a brief introduction as follows:
1)GaN epitaxial growth on sapphire template;
Conduction Type: Si doped (N+)
Thickness:4um,20um,30um,50um,100um
Orientation: c-axis (0001) ± 1.0°
Resistivity: <0.05 Ohm.cm
Dislocation Density:<1x108cm-2
Substrate Structure: GaN on Sapphire(0001)
Front Surface Finish (Ga-face): As-grown
Back Surface Finish: SSP or DSP
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm), 3” (76.2 mm) and 4” (100 mm)
Available Grades: Production, Research and Rider
2)AlN epitaxial growth on sapphire template;
Conduction Type: semi-insulating
Thickness:50-1000nm+/- 10%
Orientation: C-axis(0001)+/-1O
Orientation Flat:A-plane
XRD FWHM of (0002):<200 arcsec
Substrate Structure: AlN on sapphire
Back Surface Finish: SSP or DSP,epi-ready
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm),
Available Grades: Production, Research and Rider
3)AlGaN epitaxial growth on sapphire, including HEMT structure;
Conduction Type: semi-insulating
Thickness:50-1000nm+/- 10%
Orientation: C-axis(0001)+/-1O
Orientation Flat:A-plane
XRD FWHM of (0002):<200 arcsec
Substrate Structure: AlGaN on sapphire
Back Surface Finish: SSP or DSP,epi-ready
Usable Area: ≥ 90 %
Available Sizes: 2” (50.8 mm),
Available Grades: Production, Research and Rider
4)LT-GaAs epi layer on GaAs substrate
Diamater(mm):Ф 50.8mm ± 1mm
Thickness:1-2um or 2-3um
Marco Defect Density:≤ 5 cm-2
Resistivity(300K):>108 Ohm-cm
Carrier:<0.5ps
Dislocation Density:<1x106cm-2
Useable Surface Area:≥80%
Polishing:Single side polished
Substrate:GaAs substrate
5)GaAs Schottky Diode Epitaxial Wafers
Epitaxial Structure |
||||||||
No. |
Material |
Composition |
Thickness Target(um) |
Thickness Tol. |
C/C(cm3) Target |
C/C Tol. |
Dopant |
Carrrier Type |
4 |
GaAs |
|
1 |
±10% |
>5.0E18 |
N/A |
Si |
N++ |
3 |
GaAs |
|
0.28 |
±10% |
2.00E+17 |
±10% |
Si |
N |
2 |
Ga1-xAlxAs |
x=0.50 |
1 |
±10% |
-- |
N/A |
-- |
-- |
1 |
GaAs |
|
0.05 |
±10% |
-- |
N/A |
-- |
-- |
Substrate: 2'',3'',4" |
6)GaAs HEMT epi wafer
1) 4" SI substrate GaAs with [100] orientation,
2) [buffer] superlattice of Al(0.3)Ga(0.7)As/GaAs with thicknesses
10/3 nm, repeat 170 times,
3) barrier Al(0.3)Ga(0.7)As 400 nm,
4) quantum well GaAs 20 nm,
5) spacer Al(0.3)Ga(0.7)As 15 nm,
6) delta-doping with Si to create electron density 5-6*10^11 cm^(-2),
7) barrier Al(0.3)Ga(0.7)As 180 nm,
8) cap layer GaAs 15nm.
7)InP epitaxial wafer:
InP Substrate:
P/E 2"dia×350+/-25um,
n-type InP:S
(100)+/-0.5°,
EDP<1E4/cm2.
One-side-polished, back-side matte etched, SEMI Flats.
EPI layer :
Epi 1: InGaAs:(100)
Thickness:100nm,
etching stop layer
Epi 2: InP:(100)
Thickness:50nm,
bonding layer
8)Blue LED wafer
p-GaN/p-AlGaN/InGaN/GaN/n-GaN/u-GaN
p-GaN 0.2um
p-AlGaN 0.03um
InGaN/GaN(active area) 0.2um
n-GaN 2.5um
Etch stop 1.0um
u- GaN (buffer) 3.5um
Al2O3 (Substrate) 430um
9)Green LED wafer
1.Sapphire substrate:430um
2.Buffer layer:20nm
3.Undoped GaN:2.5um
4.Si doped GaN 3um
5.Quantum well light emtting area:200nm
6.Electron barrier layer 20nm
7.Mg DOPED GaN 200nm
8.Surface contact 10nm
Related Products:
InGaN epitxial growth on sapphire.
AlGaP/GaAs Epi Wafer for Solar Cell
GaAs Based Epitaxial Wafer for LED and LD
GaAs pHEMT epi wafer
GaAs mHEMT epi wafer
GaAs HBT epi wafer
InGaAs/InP epi wafer for PIN
InP/InGaAs/InP epi wafer
SiC epitaxial wafer:
Source: semiconductorwafers.net
For more information, please visit our website: www.semiconductorwafers.net,
send us email at luna@powerwaywafer.com or powerwaymaterial@gmail.com.