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3.Definitions of Silicon Carbide Epitaxy
  • 3-9. Comet Tails

    2018-01-08

    Comet tails have a discrete head and trailing tail. These features are aligned parallel to the major  at. Usually, all comet tails tend to be of the same length. Count once per occurrence. Two comet tails within 200 microns count as one.

  • 3-10. Carrots

    2018-01-08

    Similar to comet tails in appearance except they are more angular and lack a discrete head. If present, these features are aligned parallel to the major  at. Usually,any carrots present tend to be of the same length. Count once per occurrence. Two carrots within 200 microns count as one.

  • 3-11. Particles

    2018-01-08

    Particles have the appearance of eyes and if present are usually concentrated at the wafer edges and not within the speci ed area. If present, count once per occurrence.Two particles within 200 microns count as one.

  • 3-12. Silicon Droplets

    2018-01-08

    Silicon droplets can appear as either small mounds or depressions in the wafer surface. Normally absent, but if present are largely concentrated at perimeter of wafer. If present, estimate the % of speci ed area affected.

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