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2-9.(Area) Wafer Contamination

2.Definition of Dimensional Properties,Terminology and Methods of Silicon Carbide Wafer

2-9.(Area) Wafer Contamination

2018-01-08

Any foreign matter on the surface in localized areas which is revealed under high intensity (or diffuse) illumination as discolored, mottled, or cloudy appearance resulting from smudges, stains or water spots.

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