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2-6.Wafer Primary Flat

2.Definition of Dimensional Properties,Terminology and Methods of Silicon Carbide Wafer

2-6.Wafer Primary Flat

2018-01-08

The flat of longest length on the wafer, oriented such that the chord is parallel with a specified low index crystal plane; major flat.


The primary at is the {10-10} plane with the at face parallel to the <11-20> direction.

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